Publications

@inproceedings{gunjala2018field,

title = {Field-varying aberration recovery in EUV microscopy using mask roughness},

author = { Gautam Gunjala and Antoine Wojdyla and Aamod Shanker and Stuart Sherwin and Markus P Benk and Kenneth A Goldberg and Patrick P Naulleau and Laura Waller},

url = {https://www.osapublishing.org/abstract.cfm?uri=COSI-2018-CW2E.2},

year  = {2018},

date = {2018-06-25},

booktitle = {Computational Optical Sensing and Imaging},

pages = {CW2E--2},

organization = {Optical Society of America},

keywords = {aberrations, EUV, speckle, statistical optics},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{shanker2018speckle,

title = {Speckle metrology for extreme ultra-violet lithography},

author = { Aamod Shanker and Laura Waller and Gautam Gunjala and Antoine Wojdyla and Dmitriy Voronov and Patrick P Naulleau},

url = {https://doi.org/10.1117/12.2299605},

doi = {10.1117/12.2299605},

year  = {2018},

date = {2018-06-01},

booktitle = {Extreme Ultraviolet (EUV) Lithography IX},

volume = {10583},

pages = {105830T},

organization = {International Society for Optics and Photonics},

keywords = {aberrations, EUV, speckle, statistical optics},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{shanker2016off,

title = {Off-axis aberration estimation in an EUV microscope using natural speckle},

author = { Aamod Shanker and Antoine Wojdyla and Gautam Gunjala and Jonathan Dong and Markus P Benk and Andrew R Neureuther and Kenneth A Goldberg and Laura Waller},

url = {https://www.osapublishing.org/abstract.cfm?uri=ISA-2016-ITh1F.2},

year  = {2016},

date = {2016-07-25},

booktitle = {Imaging Systems and Applications},

pages = {ITh1F--2},

organization = {Optical Society of America},

keywords = {aberrations, EUV, speckle},

pubstate = {published},

tppubtype = {inproceedings}

}

@inproceedings{gunjala2016optical,

title = {Optical transfer function characterization using a weak diffuser},

author = { Gautam Gunjala and Aamod Shanker and Volker Jaedicke and Nick Antipa and Laura Waller},

url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9713/1/Optical-transfer-function-characterization-using-a-weak-diffuser/10.1117/12.2213271.short?SSO=1},

year  = {2016},

date = {2016-03-25},

booktitle = {Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXIII},

volume = {9713},

pages = {971315},

organization = {International Society for Optics and Photonics},

keywords = {aberrations, speckle, statistical optics},

pubstate = {published},

tppubtype = {inproceedings}

}