Publications

@article{gunjala2020extreme,

title = {Extreme ultraviolet microscope characterization using photomask surface roughness },

author = {Gautam Gunjala and Antoine Wojdyla and Stuart Sherwin and Aamod Shanker and Markus P. Benk and Kenneth A. Goldberg and Patrick P. Naulleau and Laura Waller },

url = {https://doi.org/10.1038/s41598-020-68588-w},

doi = {10.1038/s41598-020-68588-w},

year  = {2020},

date = {2020-07-15},

journal = {Scientific Reports},

volume = {10},

number = {1},

pages = {11673},

keywords = {aberrations, EUV, high-resolution, self-calibration},

pubstate = {published},

tppubtype = {article}

}

@article{10.1117/1.JMM.16.4.041012,

title = {Modeling high-efficiency extreme ultraviolet etched multilayer phase-shift masks},

author = {Stuart Sherwin and Andrew Neureuther and Patrick Naulleau},

url = {https://doi.org/10.1117/1.JMM.16.4.041012},

doi = {10.1117/1.JMM.16.4.041012},

year  = {2017},

date = {2017-12-09},

journal = {Journal of Micro/Nanolithography, MEMS, and MOEMS},

volume = {16},

number = {4},

pages = {1 -- 15},

publisher = {SPIE},

keywords = {EUV, experimental design, lithography, optical models},

pubstate = {published},

tppubtype = {article}

}

@article{claus2015quantitative,

title = {Quantitative phase retrieval with arbitrary pupil and illumination},

author = { Rene A Claus and Patrick P Naulleau and Andrew R Neureuther and Laura Waller},

url = {https://doi.org/10.1364/OE.23.026672},

doi = {10.1364/OE.23.026672},

year  = {2015},

date = {2015-10-02},

journal = {Optics express},

volume = {23},

number = {20},

pages = {26672--26682},

publisher = {Optical Society of America},

keywords = {algorithms, EUV, phase imaging},

pubstate = {published},

tppubtype = {article}

}

@article{shanker2014transport,

title = {Transport of intensity phase imaging in the presence of curl effects induced by strongly absorbing photomasks},

author = { Aamod Shanker and Lei Tian and Martin Sczyrba and Brid Connolly and Andrew R Neureuther and Laura Waller},

url = {https://doi.org/10.1364/AO.53.0000J1},

doi = {10.1364/AO.53.0000J1},

year  = {2014},

date = {2014-10-23},

journal = {Applied optics},

volume = {53},

number = {34},

pages = {J1--J6},

publisher = {Optical Society of America},

keywords = {algorithms, EUV, physics-based, TIE},

pubstate = {published},

tppubtype = {article}

}