Publications
Aamod Shanker; Antoine Wojdyla; Laura Waller; Andrew R. Neureuther
Differential methods in phase imaging for optical lithography PhD Thesis
PhD thesis, University of California, Berkeley (May 2018), 2018.
Links | BibTeX | Tags: EUV, lithography, phase from defocus, phase imaging, TIE
@phdthesis{shanker2018differential,
title = {Differential methods in phase imaging for optical lithography},
author = { Aamod Shanker and Antoine Wojdyla and Laura Waller and Andrew R. Neureuther},
url = {https://www2.eecs.berkeley.edu/Pubs/TechRpts/2018/EECS-2018-160.html
http://www2.eecs.berkeley.edu/Pubs/TechRpts/2018/EECS-2018-160.pdf},
year = {2018},
date = {2018-12-01},
school = {PhD thesis, University of California, Berkeley (May 2018)},
keywords = {EUV, lithography, phase from defocus, phase imaging, TIE},
pubstate = {published},
tppubtype = {phdthesis}
}
Chao Zuo; Qian Chen; Lei Tian; Laura Waller; Anand Asundi
Transport of intensity phase retrieval and computational imaging for partially coherent fields: The phase space perspective Journal Article
In: Optics and Lasers in Engineering, vol. 71, pp. 20–32, 2015.
Links | BibTeX | Tags: partial coherence, phase from defocus, phase imaging, phase space, TIE
@article{zuo2015transport,
title = {Transport of intensity phase retrieval and computational imaging for partially coherent fields: The phase space perspective},
author = { Chao Zuo and Qian Chen and Lei Tian and Laura Waller and Anand Asundi},
url = {https://doi.org/10.1016/j.optlaseng.2015.03.006},
doi = {10.1016/j.optlaseng.2015.03.006},
year = {2015},
date = {2015-03-06},
journal = {Optics and Lasers in Engineering},
volume = {71},
pages = {20--32},
publisher = {Elsevier},
keywords = {partial coherence, phase from defocus, phase imaging, phase space, TIE},
pubstate = {published},
tppubtype = {article}
}
Aamod Shanker; Lei Tian; Martin Sczyrba; Brid Connolly; Andrew R Neureuther; Laura Waller
Transport of intensity phase imaging in the presence of curl effects induced by strongly absorbing photomasks Journal Article
In: Applied optics, vol. 53, no. 34, pp. J1–J6, 2014.
Links | BibTeX | Tags: algorithms, EUV, physics-based, TIE
@article{shanker2014transport,
title = {Transport of intensity phase imaging in the presence of curl effects induced by strongly absorbing photomasks},
author = { Aamod Shanker and Lei Tian and Martin Sczyrba and Brid Connolly and Andrew R Neureuther and Laura Waller},
url = {https://doi.org/10.1364/AO.53.0000J1},
doi = {10.1364/AO.53.0000J1},
year = {2014},
date = {2014-10-23},
journal = {Applied optics},
volume = {53},
number = {34},
pages = {J1--J6},
publisher = {Optical Society of America},
keywords = {algorithms, EUV, physics-based, TIE},
pubstate = {published},
tppubtype = {article}
}
Yunhui Zhu; Aamod Shanker; Lei Tian; Laura Waller; George Barbastathis
Low-noise phase imaging by hybrid uniform and structured illumination transport of intensity equation Journal Article
In: Optics express, vol. 22, no. 22, pp. 26696–26711, 2014.
Links | BibTeX | Tags: phase imaging, structured illumination, TIE
@article{zhu2014low,
title = {Low-noise phase imaging by hybrid uniform and structured illumination transport of intensity equation},
author = { Yunhui Zhu and Aamod Shanker and Lei Tian and Laura Waller and George Barbastathis},
url = {https://doi.org/10.1364/OE.22.026696},
doi = {10.1364/OE.22.026696},
year = {2014},
date = {2014-10-21},
journal = {Optics express},
volume = {22},
number = {22},
pages = {26696--26711},
publisher = {Optical Society of America},
keywords = {phase imaging, structured illumination, TIE},
pubstate = {published},
tppubtype = {article}
}
Aamod Shanker; Laura Waller; Andrew R Neureuther
Defocus based phase imaging for quantifying electromagnetic edge effects in photomasks Masters Thesis
Master’s thesis, University of California, Berkeley (May 2014), 2014.
Links | BibTeX | Tags: algorithms, EUV, phase imaging, TIE
@mastersthesis{shanker2014defocus,
title = {Defocus based phase imaging for quantifying electromagnetic edge effects in photomasks},
author = { Aamod Shanker and Laura Waller and Andrew R Neureuther},
url = {https://www2.eecs.berkeley.edu/Pubs/TechRpts/2014/EECS-2014-105.html},
year = {2014},
date = {2014-05-16},
school = {Master’s thesis, University of California, Berkeley (May 2014)},
keywords = {algorithms, EUV, phase imaging, TIE},
pubstate = {published},
tppubtype = {mastersthesis}
}
Zhong Jingshan; Rene A Claus; Justin Dauwels; Lei Tian; Laura Waller
Transport of intensity phase imaging by intensity spectrum fitting of exponentially spaced defocus planes Journal Article
In: Optics express, vol. 22, no. 9, pp. 10661–10674, 2014.
Links | BibTeX | Tags: experimental design, phase from defocus, phase imaging, TIE
@article{jingshan2014transport,
title = {Transport of intensity phase imaging by intensity spectrum fitting of exponentially spaced defocus planes},
author = { Zhong Jingshan and Rene A Claus and Justin Dauwels and Lei Tian and Laura Waller},
url = {https://doi.org/10.1364/OE.22.010661},
doi = {10.1364/OE.22.010661},
year = {2014},
date = {2014-04-25},
journal = {Optics express},
volume = {22},
number = {9},
pages = {10661--10674},
publisher = {Optical Society of America},
keywords = {experimental design, phase from defocus, phase imaging, TIE},
pubstate = {published},
tppubtype = {article}
}
Laura Waller; Dmitry V Dylov; Jason W Fleischer
Quantitative amplification of weak images by nonlinear propagation Journal Article
In: Optics letters, vol. 38, no. 2, pp. 82–84, 2013.
Links | BibTeX | Tags: algorithms, partial coherence, TIE
@article{waller2013quantitative,
title = {Quantitative amplification of weak images by nonlinear propagation},
author = { Laura Waller and Dmitry V Dylov and Jason W Fleischer},
url = {https://doi.org/10.1364/OL.38.000082},
doi = {10.1364/OL.38.000082},
year = {2013},
date = {2013-01-04},
journal = {Optics letters},
volume = {38},
number = {2},
pages = {82--84},
publisher = {Optical Society of America},
keywords = {algorithms, partial coherence, TIE},
pubstate = {published},
tppubtype = {article}
}
Percival F Almoro; Laura Waller; Mostafa Agour; Claas Falldorf; Giancarlo Pedrini; Wolfgang Osten; Steen G Hanson
Enhanced deterministic phase retrieval using a partially developed speckle field Journal Article
In: Optics letters, vol. 37, no. 11, pp. 2088–2090, 2012.
Links | BibTeX | Tags: diffuser, phase imaging, TIE
@article{almoro2012enhanced,
title = {Enhanced deterministic phase retrieval using a partially developed speckle field},
author = { Percival F Almoro and Laura Waller and Mostafa Agour and Claas Falldorf and Giancarlo Pedrini and Wolfgang Osten and Steen G Hanson},
url = {https://doi.org/10.1364/OL.37.002088},
doi = {10.1364/OL.37.002088},
year = {2012},
date = {2012-05-30},
journal = {Optics letters},
volume = {37},
number = {11},
pages = {2088--2090},
publisher = {Optical Society of America},
keywords = {diffuser, phase imaging, TIE},
pubstate = {published},
tppubtype = {article}
}
Laura Waller; George Barbastathis
Phase From Defocused Color Images Patent
US12/898,830, 2011.
Abstract | Links | BibTeX | Tags: phase imaging, TIE
@patent{waller2013colorTIE,
title = {Phase From Defocused Color Images },
author = {Laura Waller and George Barbastathis},
url = {https://patents.google.com/patent/US20110085173A1/en?},
year = {2011},
date = {2011-04-14},
number = {US12/898,830},
abstract = {Phase differences associated with a defocused wavefront can be determined from a single color image. The color image, which is a measurement of intensity as a function of wavelength, is used to calculate the change in intensity with respect to wavelength over the image plane. The change in intensity can then be used to estimate a phase difference associated with the defocused wavefront using two-dimensional fast Fourier transform solvers. The phase difference can be used to infer information about objects in the path of the defocused wavefront. For example, it can be used to determine an object's shape, surface profile, or refractive index profile. It can also be used to calculate path length differences for actuating adaptive optical systems. Compared to other techniques, deriving phase from defocused color images is faster, simpler, and can be implemented using standard color filters.},
keywords = {phase imaging, TIE},
pubstate = {published},
tppubtype = {patent}
}
Laura Waller; Shan Shan Kou; Colin JR Sheppard; George Barbastathis
Phase from chromatic aberrations Journal Article
In: Optics express, vol. 18, no. 22, pp. 22817–22825, 2010.
Links | BibTeX | Tags: aberrations, phase imaging, TIE
@article{waller2010phase,
title = {Phase from chromatic aberrations},
author = { Laura Waller and Shan Shan Kou and Colin JR Sheppard and George Barbastathis},
url = {https://doi.org/10.1364/OE.18.022817},
doi = {10.1364/OE.18.022817},
year = {2010},
date = {2010-10-13},
journal = {Optics express},
volume = {18},
number = {22},
pages = {22817--22825},
publisher = {Optical Society of America},
keywords = {aberrations, phase imaging, TIE},
pubstate = {published},
tppubtype = {article}
}
Laura Waller; Yuan Luo; Se Young Yang; George Barbastathis
Transport of intensity phase imaging in a volume holographic microscope Journal Article
In: Optics letters, vol. 35, no. 17, pp. 2961–2963, 2010.
Links | BibTeX | Tags: phase imaging, TIE
@article{waller2010transport,
title = {Transport of intensity phase imaging in a volume holographic microscope},
author = { Laura Waller and Yuan Luo and Se Young Yang and George Barbastathis},
url = {https://doi.org/10.1364/OL.35.002961},
doi = {10.1364/OL.35.002961},
year = {2010},
date = {2010-08-26},
journal = {Optics letters},
volume = {35},
number = {17},
pages = {2961--2963},
publisher = {Optical Society of America},
keywords = {phase imaging, TIE},
pubstate = {published},
tppubtype = {article}
}
Laura Waller
Computational phase imaging based on intensity transport PhD Thesis
Massachusetts Institute of Technology, 2010.
Abstract | Links | BibTeX | Tags: phase from defocus, phase imaging, TIE
@phdthesis{waller2010computational,
title = {Computational phase imaging based on intensity transport},
author = { Laura Waller},
url = {http://hdl.handle.net/1721.1/60821},
year = {2010},
date = {2010-06-01},
school = {Massachusetts Institute of Technology},
abstract = {Light is a wave, having both an amplitude and a phase. However, optical frequencies are too high to allow direct detection of phase; thus, our eyes and cameras see only real values - intensity. Phase carries important information about a wavefront and is often used for visualization of biological samples, density distributions and surface profiles. This thesis develops new methods for imaging phase and amplitude from multi-dimensional intensity measurements. Tomographic phase imaging of diffusion distributions is described for the application of water content measurement in an operating fuel cell. Only two projection angles are used to detect and localize large changes in membrane humidity. Next, several extensions of the Transport of Intensity technique are presented. Higher order axial derivatives are suggested as a method for correcting nonlinearity, thus improving range and accuracy. To deal with noisy images, complex Kalman filtering theory is proposed as a versatile tool for complex-field estimation. These two methods use many defocused images to recover phase and amplitude. The next technique presented is a single-shot quantitative phase imaging method which uses chromatic aberration as the contrast mechanism. Finally, a novel single-shot complex-field technique is presented in the context of a Volume Holographic Microscopy (VHM). All of these techniques are in the realm of computational imaging, whereby the imaging system and post-processing are designed in parallel.},
keywords = {phase from defocus, phase imaging, TIE},
pubstate = {published},
tppubtype = {phdthesis}
}
Laura Waller; Lei Tian; George Barbastathis
Transport of intensity phase-amplitude imaging with higher order intensity derivatives Journal Article
In: Optics express, vol. 18, no. 12, pp. 12552–12561, 2010.
Links | BibTeX | Tags: algorithms, phase imaging, TIE
@article{waller2010transportb,
title = {Transport of intensity phase-amplitude imaging with higher order intensity derivatives},
author = { Laura Waller and Lei Tian and George Barbastathis},
url = {https://doi.org/10.1364/OE.18.012552},
doi = {10.1364/OE.18.012552},
year = {2010},
date = {2010-05-27},
journal = {Optics express},
volume = {18},
number = {12},
pages = {12552--12561},
publisher = {Optical Society of America},
keywords = {algorithms, phase imaging, TIE},
pubstate = {published},
tppubtype = {article}
}
Shan Shan Kou; Laura Waller; George Barbastathis; Colin JR Sheppard
Transport-of-intensity approach to differential interference contrast (TI-DIC) microscopy for quantitative phase imaging Journal Article
In: Optics letters, vol. 35, no. 3, pp. 447–449, 2010.
Links | BibTeX | Tags: algorithms, DIC, phase imaging, TIE
@article{kou2010transport,
title = {Transport-of-intensity approach to differential interference contrast (TI-DIC) microscopy for quantitative phase imaging},
author = { Shan Shan Kou and Laura Waller and George Barbastathis and Colin JR Sheppard},
url = {https://doi.org/10.1364/OL.35.000447},
doi = {10.1364/OL.35.000447},
year = {2010},
date = {2010-01-29},
journal = {Optics letters},
volume = {35},
number = {3},
pages = {447--449},
publisher = {Optical Society of America},
keywords = {algorithms, DIC, phase imaging, TIE},
pubstate = {published},
tppubtype = {article}
}