Publications

Publications

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Aamod Shanker; Antoine Wojdyla; Laura Waller; Andrew R. Neureuther

Differential methods in phase imaging for optical lithography PhD Thesis

PhD thesis, University of California, Berkeley (May 2018), 2018.

Links | BibTeX | Tags: EUV, lithography, phase from defocus, phase imaging, TIE

Aamod Shanker; Lei Tian; Martin Sczyrba; Brid Connolly; Andrew R Neureuther; Laura Waller

Recovering curl using an iterative solver for the transport of intensity equation Proceedings Article

In: Imaging Systems and Applications, pp. ITh2A–5, Optical Society of America 2015.

Links | BibTeX | Tags: phase from defocus, self-calibration, TIE

Chao Zuo; Qian Chen; Lei Tian; Laura Waller; Anand Asundi

Transport of intensity phase retrieval and computational imaging for partially coherent fields: The phase space perspective Journal Article

In: Optics and Lasers in Engineering, vol. 71, pp. 20–32, 2015.

Links | BibTeX | Tags: partial coherence, phase from defocus, phase imaging, phase space, TIE

Aamod Shanker; Lei Tian; Martin Sczyrba; Brid Connolly; Andrew R Neureuther; Laura Waller

Transport of intensity phase imaging in the presence of curl effects induced by strongly absorbing photomasks Journal Article

In: Applied optics, vol. 53, no. 34, pp. J1–J6, 2014.

Links | BibTeX | Tags: algorithms, EUV, physics-based, TIE

Yunhui Zhu; Aamod Shanker; Lei Tian; Laura Waller; George Barbastathis

Low-noise phase imaging by hybrid uniform and structured illumination transport of intensity equation Journal Article

In: Optics express, vol. 22, no. 22, pp. 26696–26711, 2014.

Links | BibTeX | Tags: phase imaging, structured illumination, TIE

Zhong Jingshan; Lei Tian; Justin Dauwels; Laura Waller

Partially coherent phase microscopy with arbitrary illumination source shape Proceedings Article

In: Computational Optical Sensing and Imaging, pp. CTu1C–5, Optical Society of America 2014.

Links | BibTeX | Tags: partial coherence, phase from defocus, phase imaging, TIE

Aamod Shanker; Lei Tian; Laura Waller

Defocus-based quantitative phase imaging by coded illumination Proceedings Article

In: Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI, pp. 89490R, International Society for Optics and Photonics 2014.

Links | BibTeX | Tags: experimental design, LED array, multiplexed illumination, phase from defocus, phase imaging, TIE

Aamod Shanker; Laura Waller; Andrew R Neureuther

Defocus based phase imaging for quantifying electromagnetic edge effects in photomasks Masters Thesis

Master’s thesis, University of California, Berkeley (May 2014), 2014.

Links | BibTeX | Tags: algorithms, EUV, phase imaging, TIE

Zhong Jingshan; Rene A Claus; Justin Dauwels; Lei Tian; Laura Waller

Non-uniform sampling and Gaussian process regression in transport of intensity phase imaging Proceedings Article

In: 2014 IEEE International Conference on Acoustics, Speech and Signal Processing (ICASSP), pp. 7784–7788, IEEE 2014.

Links | BibTeX | Tags: algorithms, phase from defocus, phase imaging, TIE

Zhong Jingshan; Rene A Claus; Justin Dauwels; Lei Tian; Laura Waller

Transport of intensity phase imaging by intensity spectrum fitting of exponentially spaced defocus planes Journal Article

In: Optics express, vol. 22, no. 9, pp. 10661–10674, 2014.

Links | BibTeX | Tags: experimental design, phase from defocus, phase imaging, TIE

Aamod Shanker; Martin Sczyrba; Brid Connolly; Franklin Kalk; Andrew R Neureuther; Laura Waller

Critical assessment of the transport of intensity equation as a phase recovery technique in optical lithography Proceedings Article

In: Optical Microlithography XXVII, pp. 90521D, International Society for Optics and Photonics 2014.

Links | BibTeX | Tags: lithography, phase imaging, TIE

Aamod Shanker; Martin Sczyrba; Brid Connolly; Andrew R Neureuther; Laura Waller

Analysis of edge effects in attenuating phase-shift masks using quantitative phase imaging Proceedings Article

In: Photomask Technology 2013, pp. 88802A, International Society for Optics and Photonics 2013.

Links | BibTeX | Tags: EUV, phase imaging, TIE

Laura Waller; Dmitry V Dylov; Jason W Fleischer

Quantitative amplification of weak images by nonlinear propagation Journal Article

In: Optics letters, vol. 38, no. 2, pp. 82–84, 2013.

Links | BibTeX | Tags: algorithms, partial coherence, TIE

Percival F Almoro; Laura Waller; Mostafa Agour; Claas Falldorf; Giancarlo Pedrini; Wolfgang Osten; Steen G Hanson

Enhanced deterministic phase retrieval using a partially developed speckle field Journal Article

In: Optics letters, vol. 37, no. 11, pp. 2088–2090, 2012.

Links | BibTeX | Tags: diffuser, phase imaging, TIE

Laura Waller; George Barbastathis

Phase From Defocused Color Images Patent

US12/898,830, 2011.

Abstract | Links | BibTeX | Tags: phase imaging, TIE

Laura Waller; Shan Shan Kou; Colin JR Sheppard; George Barbastathis

Phase from chromatic aberrations Journal Article

In: Optics express, vol. 18, no. 22, pp. 22817–22825, 2010.

Links | BibTeX | Tags: aberrations, phase imaging, TIE

Laura Waller; Yuan Luo; Se Young Yang; George Barbastathis

Transport of intensity phase imaging in a volume holographic microscope Journal Article

In: Optics letters, vol. 35, no. 17, pp. 2961–2963, 2010.

Links | BibTeX | Tags: phase imaging, TIE

Laura Waller

Computational phase imaging based on intensity transport PhD Thesis

Massachusetts Institute of Technology, 2010.

Abstract | Links | BibTeX | Tags: phase from defocus, phase imaging, TIE

Laura Waller; Lei Tian; George Barbastathis

Transport of intensity phase-amplitude imaging with higher order intensity derivatives Journal Article

In: Optics express, vol. 18, no. 12, pp. 12552–12561, 2010.

Links | BibTeX | Tags: algorithms, phase imaging, TIE

Shan Shan Kou; Laura Waller; George Barbastathis; Colin JR Sheppard

Transport-of-intensity approach to differential interference contrast (TI-DIC) microscopy for quantitative phase imaging Journal Article

In: Optics letters, vol. 35, no. 3, pp. 447–449, 2010.

Links | BibTeX | Tags: algorithms, DIC, phase imaging, TIE

Laura Waller; Lei Tian; George Barbastathis

Transport of Intensity Imaging with Higher Order Derivatives Proceedings Article

In: Computational Optical Sensing and Imaging, pp. CThA3, Optical Society of America 2009.

Links | BibTeX | Tags: phase from defocus, phase imaging, TIE