Publications

@phdthesis{shanker2018differential,

title = {Differential methods in phase imaging for optical lithography},

author = { Aamod Shanker and Antoine Wojdyla and Laura Waller and Andrew R. Neureuther},

url = {https://www2.eecs.berkeley.edu/Pubs/TechRpts/2018/EECS-2018-160.html

http://www2.eecs.berkeley.edu/Pubs/TechRpts/2018/EECS-2018-160.pdf},

year  = {2018},

date = {2018-12-01},

school = {PhD thesis, University of California, Berkeley (May 2018)},

keywords = {EUV, lithography, phase from defocus, phase imaging, TIE},

pubstate = {published},

tppubtype = {phdthesis}

}

@phdthesis{claus2015partially,

title = {Partially Coherent Quantitative Phase Retrieval with Applications to Extreme Ultraviolet Lithography},

author = {Rene A Claus},

url = {https://search-proquest-com.libproxy.berkeley.edu/docview/1779555925?accountid=14496},

isbn = {978-1-339-59311-1},

year  = {2015},

date = {2015-12-01},

school = {University of California, Berkeley},

keywords = {EUV, lithography, partial coherence, phase imaging},

pubstate = {published},

tppubtype = {phdthesis}

}