Aamod Shanker

Publications by Aamod Shanker
A. Neureuther, A. Shanker, L. Waller(December 24, 2014)
A. Shanker, M. Sczyrba, B. Connolly, A. Neureuther, L. Waller, in Fraunhofer IISB Lithography Simulation workshop, September 2014, Hersbruck, Germany. *Invited
Keywords: 2014, lithography, phase imaging
Categories: Conference
A. Shanker, G. Barbastathis, L. Tian, L. Waller, Y. Zhu(October 22, 2014)
Y. Zhu, A. Shanker, L. Tian, L. Waller, G. Barbastathis, Optics Express 22(22), 26696-26711 (2014).
Keywords: 2014, phase imaging
Categories: Journal Papers
A. Neureuther, A. Shanker, L. Tian, L. Waller(September 29, 2014)
A. Shanker, L. Tian, M. Sczyrba, B. Connolly, A. Neureuther, L. Waller, Applied Optics 53:34 (2014).
Keywords: 2014, lithography, phase imaging
Categories: Journal Papers
A. Shanker(May 20, 2014)
A. Shanker, M.S. Thesis (2014).
Keywords: 2014, lithography, phase imaging
Categories: Theses
A. Neureuther, A. Shanker, L. Waller(April 19, 2014)
A. Shanker, M. Sczyrba, B. Connolly, F. Kalk, A. Neureuther, L. Waller, in SPIE Optical Microlithography XXVII conference of Advanced Lithography, paper 9052-49, February 2014, San Jose, CA.
Keywords: 2014, lithography, phase imaging
Categories: Conference
A. Neureuther, A. Shanker, L. Waller(March 1, 2014)
A. Shanker, M. Sczyrba, B. Connolly, F. Kalk, A. Neureuther, L. Waller, in CSTIC Semicon China conference, paper 2-17, March 2014, Shanghai, China. *Invited
Keywords: 2014, lithography, phase imaging
Categories: Conference
A. Neureuther, A. Shanker, L. Waller(October 23, 2013)
A. Shanker, M. Sczyrba, B. Connolly, F. Kalk, A. Neureuther, L. Waller, in SPIE Phomask Technology conference, September 2013, Monterey, CA.
Keywords: 2013, lithography, phase imaging
Categories: Conference