Conference papers

Conference papers
L. Waller, N. Antipa(June 1, 2016)
N. Antipa, S. Necula, R. Ng, L. Waller, International Conference on Computational Photography, paper 57, April 2016, Chicago, IL.
Keywords: 2016, phase-space optics
Categories: Conference
A. Neureuther, L. Waller, R. Claus(December 24, 2014)
R. Claus, A. Neureuther, P. Naulleau, L. Waller, in SPIE Photomask Technology conference, paper 9235-45, October 2014, Monterey, CA.
Keywords: 2014, lithography, phase imaging
Categories: Conference
A. Neureuther, A. Shanker, L. Waller(December 24, 2014)
A. Shanker, M. Sczyrba, B. Connolly, A. Neureuther, L. Waller, in Fraunhofer IISB Lithography Simulation workshop, September 2014, Hersbruck, Germany. *Invited
Keywords: 2014, lithography, phase imaging
Categories: Conference
A. Neureuther, L. Waller, R. Claus(April 19, 2014)
R. Claus, A. Neureuther, L. Waller, P. Naulleau, in SPIE Optical Microlithography XXVII conference of Advanced Lithography, February 2014, San Jose, CA.
Keywords: 2014, lithography
Categories: Conference
A. Neureuther, A. Shanker, L. Waller(April 19, 2014)
A. Shanker, M. Sczyrba, B. Connolly, F. Kalk, A. Neureuther, L. Waller, in SPIE Optical Microlithography XXVII conference of Advanced Lithography, paper 9052-49, February 2014, San Jose, CA.
Keywords: 2014, lithography, phase imaging
Categories: Conference
A. Neureuther, A. Shanker, L. Waller(March 1, 2014)
A. Shanker, M. Sczyrba, B. Connolly, F. Kalk, A. Neureuther, L. Waller, in CSTIC Semicon China conference, paper 2-17, March 2014, Shanghai, China. *Invited
Keywords: 2014, lithography, phase imaging
Categories: Conference
A. Neureuther, A. Shanker, L. Waller(October 23, 2013)
A. Shanker, M. Sczyrba, B. Connolly, F. Kalk, A. Neureuther, L. Waller, in SPIE Phomask Technology conference, September 2013, Monterey, CA.
Keywords: 2013, lithography, phase imaging
Categories: Conference