Conference papers
Measuring the Phase of EUV Photomasks Inproceedings
In: International Conference on Extreme Ultraviolet Lithography 2019, pp. 111471F, International Society for Optics and Photonics 2019.
Advanced multilayer mirror design to mitigate EUV shadowing Inproceedings
In: Extreme Ultraviolet (EUV) Lithography X, pp. 1095715, International Society for Optics and Photonics 2019.