Conference papers

@inproceedings{sherwin2019measuring,

title = {Measuring the Phase of EUV Photomasks},

author = { Stuart Sherwin and Isvar Cordova and Laura Waller and Andrew R Neureuther and Patrick P Naulleau},

url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11147/111471F/Measuring-the-Phase-of-EUV-Photomasks/10.1117/12.2538107.full},

year  = {2019},

date = {2019-11-11},

booktitle = {International Conference on Extreme Ultraviolet Lithography 2019},

volume = {11147},

pages = {111471F},

organization = {International Society for Optics and Photonics},

keywords = {absorber, EUV, multilayer, phase-imaging},

pubstate = {published},

tppubtype = {inproceedings}

}