Journal papers
Extreme ultraviolet microscope characterization using photomask surface roughness Journal Article
In: Scientific Reports, vol. 10, no. 1, pp. 11673, 2020.
Modeling high-efficiency extreme ultraviolet etched multilayer phase-shift masks Journal Article
In: Journal of Micro/Nanolithography, MEMS, and MOEMS, vol. 16, no. 4, pp. 1 – 15, 2017.
Quantitative phase retrieval with arbitrary pupil and illumination Journal Article
In: Optics express, vol. 23, no. 20, pp. 26672–26682, 2015.
Transport of intensity phase imaging in the presence of curl effects induced by strongly absorbing photomasks Journal Article
In: Applied optics, vol. 53, no. 34, pp. J1–J6, 2014.